发明名称 PARALLEL PROCESSING METHOD FOR SEMICONDUCTOR TESTING DEVICE AND SEMICONDUCTOR TESTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor testing device and a parallel processing method for it having a plurality of memory banks, a controller, and a data processing processor for performing measurement and data processing in parallel. SOLUTION: In this parallel processing method for the semiconductor device, the controller 20b is provided with a step for controlling measurement data collection on the basis of a measurement condition matching execution of measurement and setting the measurement condition data in a memorized register 10 and a step for notifying the end of the measurement when measurement storage is finished, while the data processing processor 50b is provided with a step for reading the measurement data stored in the memory bank MB and the measurement condition data stored in the memorized register 10 at the same time and a step for receiving the both data managed synchronously and performing predetermined measurement data processing for making determination in a predetermined way.
申请公布号 JP2002350498(A) 申请公布日期 2002.12.04
申请号 JP20010160153 申请日期 2001.05.29
申请人 ADVANTEST CORP 发明人 SUZAWA HIDEYUKI
分类号 G01R31/28;(IPC1-7):G01R31/28 主分类号 G01R31/28
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