GRINDING DEVICE AND GRINDING METHOD

摘要

PROBLEM TO BE SOLVED: To prevent a workpiece from cracking or abnormal tipping in grinding effectively, without causing irregular machining due to misalignment or troubles on a rotation drive system. SOLUTION: The center lines of shafts for grinding wheels 22A, 22B, 22C and 22D are inclined against the machining feed direction so that the grinding wheels approach gradually a glass substrate 1 from the grinding wheel of the first stage 22A to the grinding wheels of the following stages 22B, 22C and 22D. Besides as regards the grinding section at least of the grinding wheel 22A of the first stage, the outer diameter for grinding start is formed smaller than that for grinding end as a tapered surface.