| 摘要 |
PROBLEM TO BE SOLVED: To form an image without unevenness by using a uniform processing liquid in the main body of a processing liquid tank by uniformizing the temperature and the distribution of components of the whole processing liquid. SOLUTION: A filter 40 is placed so that a processing liquid in the main body 32 of the processing liquid tank can be cleaned, and a subtank 46 is installed on its vertical side 42. Distribution holes 48 are bored at the vertical side wall 42 of the subtank 46. A processing liquid circulation pipeline system takes the processing liquid from the lower part of the processing liquid stored in the main body 32 of the processing liquid tank and feeds the liquid into the subtank 46. The processing liquid is evenly fed in a depth direction from the upper part of the processing liquid stored in the main body 32 of the processing liquid tank to the lower part over a long range through a plurality of distribution holes 48. Thereby, the processing liquid is evenly mixed with the processing liquid which has been in the main body 32 of the processing liquid tank. The processing liquid stored in the main body 32 of the processing liquid tank is caused to flow from the upper part to the lower part, dust in the processing liquid are placed on the flow of the processing liquid, sent down by their dead weights, and then captured by the filter.
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