| 摘要 |
PROBLEM TO BE SOLVED: To further simplify structure by polishing a planar member by a polishing tape extending from reels to reels. SOLUTION: This device comprises a holding base 4 capable of holding a planar member W, a reciprocating mechanism 2 for reciprocating the holding base 4, a tape transfer mechanism 7 which is arranged oppositely to the holding base 4 and transfers the polishing tape T extending from reels 15, 16 to reels 15, 16 in the reciprocating direction of the holding base 4, a pressure receiving member 20 capable of bringing the polishing tape T extending from the reels 15, 16 to the reels 15, 16 in pressure contact with the planar member W, a moving mechanism 8 for moving the tape transfer mechanism 7 in a direction opposite to the holding base 4, a feed control part 30 capable of controlling the reciprocating operation of the holding base 4 by the reciprocating mechanism 2, and a tape transfer control part 31 capable of controlling the transfer of the polishing tape T by synchronizing with the reciprocating operation of the holding base 4 by the reciprocating mechanism 2. |
