| 摘要 |
PROBLEM TO BE SOLVED: To improve reliability of the thermo-compression bonding by uniformly applying the pressure to a work having thickness deviation along a slope of work with a pressure-applying surface of a heater tool in a thermo-compression bonding for pressing the heater tool heated by the pulse heat system against the work. SOLUTION: By providing slide parts 101 which move straight each other and slide in the horizontal direction and a spring 104 which deflects in a bending direction of a shaft between an elevating/lowering shaft 100 and the heater tool 108, the pressure-applying surface 108A of the heater tool 108 can uniformly apply the pressure along the slope of the work, and the predetermined pressure and the predetermined heating temperature can be applied to the entire area of a joining surface. |
