| 摘要 |
PROBLEM TO BE SOLVED: To provide an observation apparatus which enables observing both images formed by radiating light and images formed by radiating X-rays by one imaging element and eliminates an imaging function for X-rays from the imaging element. SOLUTION: When the X-ray 5a is radiated to a substrate 15 which becomes a circuit board, a fluorescent image of a registration mark of the substrate 15 is formed on a scintillator film 19. When a visible beam of light 21a is radiated to a mask substrate 17, a projection image of a registration mark of the mask substrate 17 is formed on the scintillator film 19. These images are imaged by a CCD camera 6. |
