CHEMICAL MECHANICAL POLISHING WITH MULTIPLE POLISHING PADS,申请号EP19990918467-传众专利搜索

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发明名称	CHEMICAL MECHANICAL POLISHING WITH MULTIPLE POLISHING PADS
摘要
申请公布号	EP1073542(B1)	申请公布日期	2002.12.04
申请号	EP19990918467	申请日期	1999.04.06
申请人	APPLIED MATERIALS, INC.	发明人	SOMEKH, SASSON
分类号	B24D13/14;B24B7/22;B24B37/04;B24B49/12;(IPC1-7):B24B37/04	主分类号	B24D13/14
代理机构		代理人
主权项
地址

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