摘要 |
PROBLEM TO BE SOLVED: To provide a highly reliable ceramic resistor, having uniform in-plane volume specific resistivity value little in dispersion among products even when the diameter or thickness of its base plate is large. SOLUTION: This resistor comprises a ceramic sintering body with >=150 mm maximum diameter and >=0.5 mm thickness. Its several parts in the outer and center region has 10<7> -10<12> Ωcm volume specific resistivity mean value at 50 deg.C, >=98% mean relative density to the theoritical density, <=1% difference between maximum and minimum relative density, and <=3 μm difference between maximum and minimum mean particle size of the main crystal phase. |