发明名称 RESISTOR, ITS MANUFACTURING METHOD AND SUPPORT SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide a highly reliable ceramic resistor, having uniform in-plane volume specific resistivity value little in dispersion among products even when the diameter or thickness of its base plate is large. SOLUTION: This resistor comprises a ceramic sintering body with >=150 mm maximum diameter and >=0.5 mm thickness. Its several parts in the outer and center region has 10<7> -10<12> &Omega;cm volume specific resistivity mean value at 50 deg.C, >=98% mean relative density to the theoritical density, <=1% difference between maximum and minimum relative density, and <=3 &mu;m difference between maximum and minimum mean particle size of the main crystal phase.
申请公布号 JP2002348175(A) 申请公布日期 2002.12.04
申请号 JP20010159632 申请日期 2001.05.28
申请人 KYOCERA CORP 发明人 SAKAGAMI MASASHI
分类号 C04B35/581;H01C7/00;H01L21/68;H01L21/683;H02N13/00 主分类号 C04B35/581
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