| 摘要 |
PROBLEM TO BE SOLVED: To provide a static pressure bearing device usable at a high vacuum in which a dimension of a bearing part is relatively small, weight is light and a high accurate positioning is realized. SOLUTION: The static pressure bearing device is provided with a static pressure pad 3; a labyrinth part 2 having an exhaust groove provided on an outer periphery of the static pressure pad 3; a gap adjustment mechanism for adjusting a gap hr of the labyrinth part 2 and non-contact type fine displacement gages 5a, 5b as a sensor for detecting the gap hr; and a control part for controlling such that a fluctuation amount of the gap hr is inputted to the gap adjustment mechanism including actuators 4a, 4b as a command value based on an output of the fine displacement gages 5a, 5b to always retain the gap hr to a constant. The exhaust groove part 18 and the labyrinth part 2 are relatively movable and are sealed by a sealing material 12 such as O ring so as to leak no gas. |
