| 发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURE THEREOF |
| 摘要 |
<p>In order to form an aluminum system wiring that does not peel off on an insulating film containing fluorine and to improve the reliability thereof, a semiconductor device according to the present invention includes an insulating film (14) containing fluorine formed on a substrate (11), a titanium aluminum alloy film (17a) formed on the insulating film (14) containing fluorine, and a metallic film (17b) comprising aluminum or an aluminum alloy formed on the titanium aluminum alloy film (17a). <IMAGE></p> |
| 申请公布号 |
EP1262804(A1) |
申请公布日期 |
2002.12.04 |
| 申请号 |
EP20010999842 |
申请日期 |
2001.12.05 |
| 申请人 |
SONY CORPORATION |
发明人 |
ENOMOTO, YOSHIYUKI;KANAMURA, RYUICHI |
| 分类号 |
H01L21/768;H01L23/52;H01L21/312;H01L21/316;H01L21/3205;H01L21/4763;H01L23/48;H01L23/522;H01L23/532;(IPC1-7):G02B5/30 |
主分类号 |
H01L21/768 |
| 代理机构 |
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