| 摘要 |
PROBLEM TO BE SOLVED: To efficiently detect a position detection offset value after a surface layer film of a mark formation part of an object to be measured is formed, and carry out high-speed and highly accurate alignment by highly accurately measuring a surface shape without contaminating or flawing the surface to be measured. SOLUTION: In measuring a solid shape of the surface of the object to be measured, the object is measured in a non contact manner by a first measuring means such as an optical measurement profiler (for example, a mirror interferometer system) or the like which is not possible to contact. With the result measured by the first measuring means taken into account, the object is measured again by a second measuring means such as an AFM, a probe type profiler or the like which is possible to contact. An operation control means for controlling the measurement operation of the second measuring means makes a probe or a stylus scan the surface of the object based on the measured result of the first measuring means while preventing the probe or stylus from strongly contacting the object surface. |
