发明名称 COMPOSITION FOR STRIPPING RESIST
摘要 PROBLEM TO BE SOLVED: To provide a composition for stripping a resist, which is capable of removing resist residue generated in the formation of wiring and excellently preventing the corrosion of a metallic wiring material in the manufacturing process of an electronic circuit for a semiconductor or a liquid crystal or the like. SOLUTION: The composition for stripping the resist contains at least one kind of a compound selected from a group expressed by formula (1). (In the formula (1), each of R1 -R4 is the same or different and represents hydrogen atom, a lower alkyl group, hydroxide group, carboxylic group, hydroxyalkyl group, alkoxy group, halogen atom or amino group.
申请公布号 JP2002351093(A) 申请公布日期 2002.12.04
申请号 JP20010152304 申请日期 2001.05.22
申请人 NAGASE CHEMTEX CORP 发明人 TAKEI MIZUKI;UCHIDA EMI;YAMASHITA MASANORI;KOTANI TAKESHI
分类号 G03F7/42;(IPC1-7):G03F7/42 主分类号 G03F7/42
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