| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanner device which can produce a strain-free SPM image by practically using a scanning frequency and a scanning displacement range as parameters to deform 'inverse hysteresis waveform'. SOLUTION: The scanner device is provided with a tube scanner 1 formed by piezoelectric elements for scanning a probe 3 in a X-Y direction along a sample 15, a computer 12 defining parameters of both the scanning frequency and scanning displacement range, and a scanning voltage generator 11 generating a scanning voltage of the scanner 1 to allow linearly-displacement of the probe 3 depending on these parameters and nonlinearity of the piezoelectric elements in the scanner 1. This scanning voltage generator 11 generates such a scanning voltage that allows displacement of the probe 3 to be linearized depending on those parameters even if they are changed.
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