发明名称 LIGHT SPECTRUM DETECTION METHOD, AND LIGHT SPECTRUM DETECTION PROGRAM, LIGHT SPECTRUM DETECTOR SPECTROSCOPE AND LASER DEVICE USING IT
摘要 PROBLEM TO BE SOLVED: To provide a light spectrum detection method and the like capable of detecting a spectrum of measured light even if the detection sensitivity of a specific channel of an optical detector is degraded. SOLUTION: This method is used for detecting the spectrum of measured light by using the optical detector having plural channels disposed in the vicinity of the image forming position of the measured light having passed a spectroscopic element. The method is provided with: a step (a) for obtaining detection data based on a detection signal outputted from the optical detector by entering the measured light into the spectroscopic element; and a step (b) for obtaining correction data generated by correcting the difference of detection sensitivity among the plural channels of the optical detector by correcting the detection data obtained in the step (a) based on test data previously obtained for calibrating the detection sensitivity of the optical detector.
申请公布号 JP2002350232(A) 申请公布日期 2002.12.04
申请号 JP20010155007 申请日期 2001.05.24
申请人 GIGAPHOTON INC;USHIO INC 发明人 TADA TERUSHI;SUGANO TAKAYUKI;OMORI TAKEO
分类号 G01J3/36;G01J3/02;G01J3/26;H01L21/027;H01S3/00;H01S3/137;H01S3/225;(IPC1-7):G01J3/36 主分类号 G01J3/36
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