| 摘要 |
PROBLEM TO BE SOLVED: To provide a stable joined material of quartz glass member and silicon carbide member and also to provide its joining method whose processing and joining of each material are easy, obtaining high joining strength, and which is reduced in cracks and/or breakings. SOLUTION: A teeth part 1b, which is formed by a slit 1a extending from one end to the other end of the tubular silicon carbide member 1 is shrink-fitted to the outer periphery of the cylindrical or bar-like quartz glass member 2.
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