| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for working a ceramic green sheet which can work in a predetermined shape without passing through a carrier film and without introducing a decrease in a working quality due to a damage of a table even in the case of passing through the film. SOLUTION: The method for working the ceramic green sheet comprises the steps of placing the ceramic green sheet 100 with the film on a support plate 11a made of a material having high thermal conductivity and a high reflectivity of a laser beam so that the carrier film 20 is contacted with the plate 11a, irradiating the sheet 10 with the laser beam 2a from the surface side which is not supported by the film 20, and working the sheet 10. Thus, a heat input by irradiating with the beam 2a is released to the plate 11a having a high thermal conductivity via the film 20, and hence a formation of a through hole at the film 20 is suppressed and prevented. |
