| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration sensor reducing the size, further easy in adjusting damping, superior in accuracy, and preventive against a shock. SOLUTION: This vibration sensor 1 is composed of magnets 3 arranged in a body part 2 fixed to a measuring object, a capacitor part 9 arranged between the magnets 3, and a detecting part 5 for detecting a change in capacitance of the capacitor part 9, and measures acceleration from a variation in the capacitance, and has a feedback circuit 6 for flowing an electric current to a coil 10 on the basis of a detecting value outputted from the detecting part 5. The capacitor part 9 is formed of electrodes 7a and 8a arranged on an upper surface of a movable part 4 (a silicon substrate 8) inserted between almost parallel two glass substrates 7 and the opposed glass substrate 7. The coil 10 is formed on an under surface of the silicon substrate 8.
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