| 摘要 |
A method and apparatus for processing order control, in which a load of an examination work to review a processing order of lots is reduced and all the lot flows are conditioned so as to move at an almost constant speed with the result that not only can accuracy in scheduling of delivery and so on be improved but degradation of the lot flows is also prevented from occurring in advance. A proper number R of in-process lots and others are obtained and lots are stacked before each of apparatuses so as to be equal in number to the proper number R of in-process lots, thereby a target of the number Cg of processing processes can be achieved. Since proper numbers of in-process lots in cases where a method in which a plurality of lots are simultaneously processed is employed and where a substitute processing method is employed can be obtained, some of the lots can be transferred to other fabrication apparatuses if the number of lots accumulated before an fabrication apparatus exceeds the proper number R of in-process lots. Furthermore, a previous process of a fabrication apparatus can process lots confirming a signal color at the next process thereof since signals each displaying a color corresponding to in-process levels of lots residing in the lot buffer can be provided to the respective fabrication apparatuses.
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