| 发明名称 |
Radiometric scatter monitor |
| 摘要 |
Scattered light is detected radiometrically in a photolithography system. A photodetector makes direct measurements of scatter at points in the line or plane of illumination, and a generalized scatter function is derived from these measured data.
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| 申请公布号 |
US6490031(B1) |
申请公布日期 |
2002.12.03 |
| 申请号 |
US20000675535 |
申请日期 |
2000.09.29 |
| 申请人 |
INTEL CORPORATION |
发明人 |
GOLDSTEIN MICHAEL;ANDRESEN KEITH |
| 分类号 |
G01J1/04;G01J1/42;(IPC1-7):G01J1/00 |
主分类号 |
G01J1/04 |
| 代理机构 |
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代理人 |
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| 地址 |
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