| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an ultraviolet irradiation apparatus that hardly cause non-uniform cleanliness by the variation of the thickness of an object and non- uniform cleanliness by the position on the surface of the object and that does not interfere with the accompanying works, and to provide a method using the same. SOLUTION: The apparatus is characterized in that the ultraviolet irradiation lamp 1 is placed in an atmosphere under reduced pressure, the object 2 is stored in an irradiation vessel (3-1, 3-2) and is exposed to irradiation of ultraviolet light emitted from the ultraviolet irradiation lamp 1, the protection vessel 4 retains the ultraviolet irradiation lamp 1 and the irradiation vessels (3-1, 3-2) inside, an atmosphere maintenance device 5 reduces pressure inside the protection vessel 4 and a ventilator 6 ventilates the inside of the irradiation vessels (3-1, 3-2) in accordance with the predetermined condition, and to provide a method using the same.</p> |
