发明名称 Modulator-integrated semiconductor laser and method of fabricating the same
摘要 A semiconductor laser is fabricated on a substrate having a laser section and a modulator section by forming a light waveguide having an active layer that extends across the laser section and the modulator section from a high reflectivity end portion to a low reflectivity end portion. The light waveguide is enclosed by an embedding structure in which first and second high resistance regions are produced on the opposite sides of the light waveguide for confining electrons between the high resistance regions. On the embedding structure are first and second contact regions corresponding respectively to the laser section and the modulator section. Portions of the substrate other an the first and second elongated contact regions are covered with an insulating layer. First and second electrodes are formed on the insulating layer for establishing ohmic contact with the first and second elongated contact regions, respectively.
申请公布号 US6489177(B1) 申请公布日期 2002.12.03
申请号 US20000627311 申请日期 2000.07.27
申请人 NEC CORPORATION 发明人 INOMOTO YASUMASA
分类号 G02F1/025;H01S5/00;H01S5/026;H01S5/042;H01S5/20;H01S5/227;H01S5/50;(IPC1-7):H01L21/00;H01L27/15;H01L219/74 主分类号 G02F1/025
代理机构 代理人
主权项
地址