发明名称 |
Fuse, memory incorporating same and method |
摘要 |
A method of making a fuse and a fuse, together with systems and integrated circuits where the fuse provides benefits, are described. A fuse comprising a conductive material is formed on a substrate. A series of dielectric layers having a composite thickness is formed on the substrate and the fuse. The series of dielectric layers serves to insulate a series of conductive layers from each other. The conductive layers are disposed above portions of the substrate. An opening is formed extending through a passivation layer and the series of dielectric layers. The opening exposes a portion of the fuse. Another dielectric layer is formed on the fuse and the fuse may thereafter be programmed by directing a laser beam onto the fuse through the opening.
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申请公布号 |
US6489244(B2) |
申请公布日期 |
2002.12.03 |
申请号 |
US20010858290 |
申请日期 |
2001.05.15 |
申请人 |
MICRON TECHNOLOGY, INC. |
发明人 |
LEE ROGER;KELLER DENNIS;KAUFFMAN RALPH |
分类号 |
H01L23/525;(IPC1-7):H01L21/311 |
主分类号 |
H01L23/525 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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