| 发明名称 |
Method of making silicon article having columns |
| 摘要 |
A silicon article including a silicon base and columns extending from the silicon base. The columns define a gap between the columns which is devoid of material so that the article can act as a filter or heat sink. Also disclosed is a method of making the silicon article. |
| 申请公布号 |
US6489005(B1) |
申请公布日期 |
2002.12.03 |
| 申请号 |
US20000660678 |
申请日期 |
2000.09.13 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ARMACOST MICHAEL D.;HOH PETER D.;NGUYEN SON V. |
| 分类号 |
B01D46/54;B01D71/02;H01L23/367;H01L23/373;(IPC1-7):B32B9/04;B32B15/04;B32B18/00 |
主分类号 |
B01D46/54 |
| 代理机构 |
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代理人 |
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| 主权项 |
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