| 摘要 |
PURPOSE: A brushing apparatus of substrate cleaning equipment is provided to completely remove particles and spots after a cleaning process, by forming an inclined band-type groove along the outer circumferential surface of a protrusive end of a rotation axis of a brush rotated by a motor and by fixing a guide bar into the outer of a case in which the end of the guide bar is inserted into the band-type groove. CONSTITUTION: A main case is prepared. Transfer rollers transfer a substrate, installed inside the case. A nozzle sprays deionized water on the transferred substrate, installed in the upper portion of the transfer rollers. A brush(105) brushes the transferred substrate, installed between the nozzle and the transfer rollers. A motor(106) rotates the brush, installed in the outer of the main case. A right-and-left transferring apparatus transfers the brush in the right-and-left directions, installed in a position opposite to the motor.
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