发明名称 |
DRY GAS SCRUBBER HAVING TEMPERATURE CONFIRMED PART |
摘要 |
PURPOSE: A dray gas scrubber having a temperature confirmed part is provided to detect easily the heat generated from the dry gas scrubber for performing a cleaning process. CONSTITUTION: A dry gas scrubber(10) includes a sealed vessel(101) and a window(102). The sealed vessel(101) is used for removing harmful elements generated from a reaction of a harmful gas and a resin. The window(102) is used for observe the inside of the dry gas scrubber(10). A temperature confirmed portion(11) includes a thermocouple(12) and an alarm portion(13). The thermocouple(12) is inserted in the inside of the sealed vessel(101). The thermocouple(12) is used for measuring heat generated from the gas scrubber(10). The alarm portion(13) is used for indicating a damage of the dry gas scrubber(10) due to the measured temperature of the thermocouple(12).
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申请公布号 |
KR20020089814(A) |
申请公布日期 |
2002.11.30 |
申请号 |
KR20010028739 |
申请日期 |
2001.05.24 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KIM, HYEONG GWAN;KO, EUN HO;LIM, JONG UK |
分类号 |
H01L21/02;(IPC1-7):H01L21/02 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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