发明名称 POROUS SILICON SUBSTRATE AND LIGHT EMITTING-ELEMENT USING THE SAME, AND METHOD FOR MANUFACTURING THE SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a porous silicon substrate, having a porous silicon layer whose light-emitting efficiency is high and whose light emission intensity is large, and to provide a light-emitting element using the porous silicon substrate and a method for manufacturing the porous silicon substrate. SOLUTION: A porous silicon layer 3, whose thickness is about 12 μm formed with a plurality of fine holes 2, is formed on a p-type monocrystal silicon substrate 1. An impurity diffusion silicon layer 4 which includes phosphorous element (P) as impurity is formed along the wall face inside the hole 2 of the porous silicon layer 3. Therefore, a p-n junction is formed along the hole 2 of the porous silicon layer 3 so that since the area of the p-n junction per unit area in the silicon substrate 1 can be substantially increased, a highly efficient light-emitting element is realized.
申请公布号 JP2002344012(A) 申请公布日期 2002.11.29
申请号 JP20010147390 申请日期 2001.05.17
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 OKU MITSUMASA
分类号 H01L27/15;H01L33/34;H01L33/42 主分类号 H01L27/15
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