| 摘要 |
<p>PROBLEM TO BE SOLVED: To assemble resonators having different resonance frequencies on the same substrate. SOLUTION: In the method for assembling a resonator (170) on a board (161), a bottom electrode layer (172) is formed, and a piezoelectric(PZ) layer (174) is formed on the bottom electrode layer (172); and a selected part (169) of the PZ layer (174) is partially etched, to form a surface electrode (176) on the selected part of the PZ layer (174).</p> |
