| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an upright wafer support jig capable of fixing an annular support plate to a support pillar by a simple structure without using a conventional welding means as fixing means, surely preventing the ring-shaped support plate from being dropped, and quickly responding to maintenance. SOLUTION: The upright wafer support jig places many wafers on many support plates stacked on a plurality of support pillars in a vertical direction at predetermined wafer placing intervals. Support grooves each of which has each support plate inserted for support are formed on the support pillars at predetermined intervals in the vertical direction. A fixing rod is provided adjacently to at least one support pillar and at least one receiving groove corresponding to the fixing rod is provided in the peripheral portion of the support pillar. The support plate is inserted for support into the support groove and the fixing rod is fitted in the receiving groove of the support pillar, thereby supporting and fixing the support plate by and to the support pillar.</p> |
