发明名称 STORAGE CONTAINER OF HIGH PURITY LIQUID SUBSTANCE
摘要 PROBLEM TO BE SOLVED: To obtain a highly reliable and easy-to-operate device for purifying the connection components or the lines of a storage container. SOLUTION: The storage container of a liquid substance being supplied to a consumption device is provided with a device for purifying a plurality of connection components (7, 8, 13, 18) upon switching the storage container (1). A solvent container (23) for cleaning these connection components (7, 8, 13, 18) and a container (28) for used solvent being evacuated as a vacuum source for sucking the solvent into these connection components (7, 8, 13, 18) constitute a housing (30) along with the storage container (1).
申请公布号 JP2002343719(A) 申请公布日期 2002.11.29
申请号 JP20020086165 申请日期 2002.03.26
申请人 CS CLEAN SYSTEMS AG 发明人 SCHOLZ CHRISTOPH
分类号 H01L21/205;B08B9/02;B65B39/04;B65B55/10;B65D83/14;B67D7/02;C23C16/54;(IPC1-7):H01L21/205 主分类号 H01L21/205
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