CENTRIFUGAL SEPARATOR FOR SEMICONDUCTOR WAFER

摘要

PROBLEM TO BE SOLVED: To provide a centrifugal separator for semiconductor wafers that suppresses contamination and cracks in semiconductor wafers in the centrifugal separator for semiconductor wafers for washing the semiconductor wafers and then carrying out dry treatment. SOLUTION: This centrifugal separator for semiconductor wafers has a rotor 2 that is rotated around a specific vertical shaft 1 where a semiconductor wafer (w) is mounted, and a casing 4 for surrounding the rotor 2. An AE sensor 6 is laid in the casing 4.