GAS INLET MEMBER OF PLASMA TREATMENT EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a gas inlet member of a plasma treatment equipment such as a plasma CVD equipment by which the occurrence of reverse discharge toward the gas influx portion (on the upper electrode side) can be prevented at the time of the excitation of plasma. SOLUTION: The gas inlet member of the plasma treatment equipment has a heat-resisting hollow-body element 2, a hollow-body part 3 for ventilation provided in the heat-resisting hollow-body element 2 and a heat-resisting porous element 4 housed in the hollow-body part 3.