| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-luminance and inexpensive light-emitting diode, that uses a metal oxide-based transparent conductive film as current diffusion film, and suppresses increase of the resistance of the transparent conductive film in an electrode-forming process. SOLUTION: At forming of electrodes 8 and 9, increase of the resistance of the metal oxide-based transparent conductive film 6 is suppressed by performing alloying heat treatment, which is performed for alloying the electrodes 8 and 9 in the electrode-forming process or heat treatment which is performed, after the electrodes 8 and 9 have been formed in the electrode- forming process in vacuum, or by conducting alloying heat treatment which is conducted for alloying a metal for electrode, after the metal has been vapor- deposited in the electrode-forming process, in a gas containing oxygen at a concentration of <=1%. |
