发明名称 HEAT-TREATING EQUIPMENT
摘要 PROBLEM TO BE SOLVED: To improve maintenance operability by simplifying the piping of an exhaustion system. SOLUTION: The heat-treating equipment is provided with a main valve 18, a 1st auxiliary valve 30, and a 2nd auxiliary valve 31 for a pipe 13 of the exhaustion system 12 of a heat-treating furnace 1, Further, the equipment has two bypass passages 32 and 33 which link the side of an entrance 22 and the side of an exit 23 to each other are formed in a main body 21 which forms the exterior of the main valve 18, and the main body 21 of the main valve 18 is provided with the 1st auxiliary valve 30 which opens and closes one bypass passage 32 and the 2nd auxiliary valve 31 which opens and closes the other bypass passage 33.
申请公布号 JP2002343781(A) 申请公布日期 2002.11.29
申请号 JP20010142881 申请日期 2001.05.14
申请人 TOKYO ELECTRON LTD 发明人 MATSUURA HIROYUKI;KOIKE SATORU
分类号 F27D19/00;C23C16/44;C23C16/52;F16K1/52;F16K51/02;F27B5/16;G05D16/16;H01L21/205;H01L21/22;H01L21/31;H01L21/324;(IPC1-7):H01L21/31 主分类号 F27D19/00
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