METHOD FOR MANUFACTURING MAGNETIC TUNNEL JUNCTION ELEMENT USING MAGNESIUM FLUORIDE AS INSULATING LAYER

摘要

PURPOSE: A method for manufacturing a magnetic tunnel junction element using magnesium fluoride as an insulating layer is provided to improve tunnel magnetic character by improving insulation character, reduce complex oxidation process. CONSTITUTION: In manufacturing an MTJ(Magnetic Tunnel Junction) including a first electrode, a second electrode, and an insulating layer arranged between the first electrode and the second electrode, a method for manufacturing a magnetic tunnel junction element includes the steps of vapor depositing magnesium and pouring fluoric gas without plasma or directly vapor depositing magnesium fluoride to form an insulating layer.