OSCILLATION DAMPING SYSTEM

摘要

PROBLEM TO BE SOLVED: To damp oscillation of the projection objective system in a projection illumination arrangement (in particular, a microlithographic projector). SOLUTION: Oscillations acting on deformation-decoupled mounts 2' and 6 and an operating element 11 in a projection illumination arrangement are detected by sensors 3. By actuators 4, waves with same or at least similar frequencies and amplitudes of anti-phases to the disturbing oscillations are generated and introduced in the mounts 2' and 6.