发明名称 APPARATUS AND METHOD FOR REMOVING ORGANIC POLYMER SUBSTANCE
摘要 PROBLEM TO BE SOLVED: To provide the removing apparatus of organic polymer substances that can reduce tact time required for treatment without contaminating an object to be washed with metal and organic impurities or the like being eluted from a pressure resistant tank by fluid, when the organic polymer substances are removed from the object to be washed where the organic polymer substance adheres or welds, and to provide the removing method of the organic polymer substances. SOLUTION: This removing apparatus 30 comprises a pressure resistant tank 1 with a lid 2 for accommodating an object 3 to be washed, a high-pressure gas container 4, valves 5, 9, 14, and 18, a compressor 6, a solvent tank 7, high- pressure pumps 8 and 13, a heater 10, a nozzle 11, a removal acceleration constituent tank 12, a pressure adjustment valve 15, a reduced-pressure container 16, a solvent separation tank 17, and a heating gas-manufacturing apparatus 19. The object 3 to be washed is put in the pressure resistant tank 1, gas having specific pressure is filled, and fluid having specific temperature is sprayed at a pressure higher than the specific pressure.
申请公布号 JP2002343760(A) 申请公布日期 2002.11.29
申请号 JP20010151127 申请日期 2001.05.21
申请人 SHARP CORP 发明人 ONO HITOSHI
分类号 B08B5/00;B08B3/08;B08B7/00;H01L21/027;H01L21/302;H01L21/304;H01L21/306;H01L21/3065;(IPC1-7):H01L21/304 主分类号 B08B5/00
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