| 摘要 |
PURPOSE: A lifter pin unit is provided to prevent the damage of a lifter pin by improving the durability of the lifter in by changing the material and structure together with the structure of a holder, thereby simplifying the substitution of the lifter pin. CONSTITUTION: A lifter pin unit for loading or unloading a target substrate to lower electrodes, includes a lifter pin element(20) having a main body part(22) for supporting the target substrate and a coupling part(24) formed of stainless steel with a strength higher than the main body part, and a holder element(26) coupled with the coupling part of the lifter pin element for fixing the lifter pin element and vertically operating together with the fixed lifter pin element. |
