SUSCEPTOR FOR FABRICATING SEMICONDUCTOR DEVICE

摘要

PURPOSE: A susceptor for fabricating a semiconductor device is provided to prevent contamination due to particles by dividing a supply line into a vacuum supply line and a nitrogen gas supply line. CONSTITUTION: An upper area is wider than a lower area in a susceptor(200). A side portion of the susceptor(200) has a circular plate(220). A hole(221) is formed in the inside of the plate(220). The hole(221) is used as a path for supplying nitrogen gas. A connection member(222) is installed at the hole(221). The connection member(222) is used for connecting a vacuum line(224) for providing a vacuum with a nitrogen gas line(226) for providing a nitrogen gas. The connection member(222) has a hole connected with the hole(221) and the first and the second hole opposite to the hole connected with the hole(221). The hole connected with the hole(221) and the first and the second hole are unified in the inside of the connection member(222). The first hole is connected with the vacuum line(224). The second hole is connected with the nitrogen gas line(226). The vacuum line(224) and the nitrogen gas line(226) are connected with the first block(228). The second block(230) is installed at an intermediate portion of the vacuum line(224) and the nitrogen gas line(226).