| 摘要 |
PROBLEM TO BE SOLVED: To provide a linear stage device capable of concurrently attaining high-precision driving at low speed and high-speed driving while using ultrasonic motors and attaining miniaturization of the whole system. SOLUTION: This linear stage device comprises a movable section 21 capable of moving in one-dimensional direction for a fixed side, and a plurality of ultrasonic motors 23, 24 which include motor ends 25, 26 in contact with a movable slide surface 22 of the movable section 21 and are secured to the fixed side. The motor front ends 25, 26 performs a circular motion or elliptical motion which is a synthetic operation of vibrations in directions parallel with and perpendicular to the movable slide surface 22, thus causing the movable section 21 to move for the fixed side. In the linear stage system, the movable section 21 can be moved at high speed by making the directions of the circular motion or elliptical motion of the motor ends 25, 26 of the first and second ultrasonic motors 23, 24 identical to each other, and can be moved at low speed by making the directions opposite. |
