发明名称 METHOD OF MANUFACTURING LAMINATED STRUCTURE FOR DISK DRIVING SUSPENSION ASSEMBLY AND LAMINATED STRUCTURE FOR THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a technique capable of making manufacturing efficiency higher and a product cost lower than the conventional production process, etc., utilizing only the dry etching process represented by plasma etching in molding an intermediate second layer consisting of an electrically insulating material in a method of manufacturing a laminated structure for a disk driving suspension assembly using a multilayered lamination sheet having a first layer consisting of a metallic spring material, the second layer described above and a third layer consisting of a conductive material. SOLUTION: The method of manufacturing the laminated structure for the disk driving suspension assembly comprising using the multilayered lamination sheet having the first layer 50 consisting of the metallic spring material, the intermediate second layer 90 consisting of the electrical insulating material and the third layer 70 consisting of the conductive material and performing the dry etching process after wet etching as a process step of molding the second layer 90 and the laminated structure thereof are provided.
申请公布号 JP2002343045(A) 申请公布日期 2002.11.29
申请号 JP20010149952 申请日期 2001.05.18
申请人 FUJIKURA LTD;INTERNATL BUSINESS MACH CORP <IBM> 发明人 NAGATA MASAKATSU;IWASAKI SHOJI;MIZUTANI MUNEKIMI;NASU YOSHIO;ISHIKAWA HIROMI;UEMATSU YOSHIO;SHI ARASHI;YOSHIDA TATSUSHI
分类号 G11B21/21;(IPC1-7):G11B21/21 主分类号 G11B21/21
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