| 摘要 |
PURPOSE: A cassette for receiving a wafer is provided to prevent a breakage of the wafer by forming grooves in a shelf. CONSTITUTION: A plurality of side plates(56) are located between first side lines(62,64) and second side lines(66,68) for supporting an upper plate(52) and a lower plate(54). A plurality of stoppers(60) are formed between third side lines(70,72) for supporting the upper and lower plates(52,54). A plurality of first shelves(58) are formed at one side of the side plates(56) and a plurality of second shelves(74) are formed at one side of the stoppers(60). That is, four side plates(56) are formed between the first side lines(62,64) and four side plates(56) are formed between the second side lines(66,68). Two stoppers(60) are formed between the third side lines(70,72). At this time, grooves are formed at each shelves(58,74).
|
