| 摘要 |
PROBLEM TO BE SOLVED: To solve curvature distortions generated at focus correction for observing oblique sample surface, which has become a problem with the recent spread of the application for measuring by tilting 60 deg. or more at a low magnification. SOLUTION: The scanning direction of electron beam is rotated in a direction reverse to the rotational distortion caused by the focus correction of an object lens for correct the distortion, when observing the oblique sample surface, the focus correction is performed, so that a whole surface is focus, to secure an image which does not have curvature distortions.
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