VACUUM SYSTEM HAVING DEVICE FOR PREVENTING LEAK OF CHILLER SOLUTION

摘要

PURPOSE: A vacuum system having a leak prevention device for preventing leak of chiller solution is provided to stop circulation of chiller solution by sensing leak of chiller solution. CONSTITUTION: A chamber(210) includes a wafer holder(3) on which a wafer(1) is loaded. A gas injection portion(240) is formed at one side of the chamber(210). A vacuum pump(20) is connected with the chamber(210). A chiller solution floating portion(60) is formed on a wall side of the gas injection portion(240). A chiller(30) is connected wit the chiller solution floating portion(60). A sensor(250) is connected with the chamber(210). A control portion(253) is connected with the sensor(250). A water leakage prevention portion(255) is controlled by the control portion(253). The water leakage prevention portion(255) is located between the chiller solution floating portion(60) and the chiller(30). A water leakage prevention portion(255) includes an air pressure valve(254).