| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma generator which generates stable, extra-fine plasma. SOLUTION: A plasma torch 1 is composed of a glass tube 2 and a metal tube 3, and a tip portion 2F (plasma generating portion and its neighboring portion) thereof has an inner diameter of, for example, about 60 μm. A high-frequency coil is wound around the tip portions 2F, and a coil 6 for ignition is wound around a vicinity of the tip portion. A wire 8 made of a high-melting metal and having a diameter of about ten and several micrometers is arranged in the torch in such a manner that its free end extends near to the center of the tip portion 2F. A gas inlet tube 9 connected to a gas bomb 10 is connected to an end of the metal tube 3, and Ar gas is introduced into the glass tube 2. Inductive coupling plasma is generated within the glass tube by high-frequency power from the high-frequency coil, and thermions from the wire 8 heated to a high temperature by induction heating by the high-frequency power are supplied to the plasma. |
