LIGHTING OPTICAL DEVICE, EXPOSURE SYSTEM, AND PRODUCTION METHOD OF MICRO DEVICE

摘要

A lighting optical device and an exposure system which reduce the number of optical members such as lenses while preventing a reduction in light quantity, can enhance a light utilization efficiency even in the case of modified lighting such as annular lighting, and can reduce running costs. Revolvers (4, 5), and a zoom optical system (6) are disposed in that order on the optical path of a light flux supplied from a light source (1).The revolvers (4, 5) are provided with diffraction optical elements for converting the light flux supplied from the light source (1) into one having a specified section shape, a plurality of diffraction optical elements having different conversion characteristics for different section shapes of light fluxes to be converted being provided. The zoom optical system (6) changes the optical intensity distribution of a light flux having the section shape thereof converted by diffraction optical elements, and consists of up to five lenses (6a - 6d) with a variable power ratio of up to 2.3.