发明名称 MULTI-PHOTON IMAGING AND QUANTUM LITHOGRAPHY
摘要 A microscope for observing a lithographic product where multi-photon entangled light passes through a first lens (Lens 1), a second lens (Lens 2) and impinges on a surface plane (Image) to observe a specimen.
申请公布号 WO02095353(A2) 申请公布日期 2002.11.28
申请号 WO2002US15132 申请日期 2002.05.17
申请人 UNIVERSITY OF MARYLAND, BALTIMORE COUNTY;SHIH, YANHUA;D'ANGELO, MILENA;CHEKHOVA, MARIA 发明人 SHIH, YANHUA;D'ANGELO, MILENA;CHEKHOVA, MARIA
分类号 G03F7/20 主分类号 G03F7/20
代理机构 代理人
主权项
地址