WORKPIECE SORTER OPERATING WITH MODULAR BARE WORKPIECE STOCKERS AND/OR CLOSED CONTAINER STOCKERS

摘要

A reticle management system is disclosed including a sorter (101) coupled to one or more stockers (102) that allow a customized configuration of the overall reticle management system. The stockers may be bare reticle stockers, closed container reticle stockers, or both. In embodiments of the present invention, the reticle management system includes between one and six individual bare reticle stockers and/or closed container stockers for storing reticles affixed to a reticle sorter. The sorter includes a reticle inspection station (104) for inspecting the reticles, a plurality of input/output load ports (106) and a reticle handling robot (108) for transferring the reticles between the stockers, inspection station, and load ports. The management system further includes a control unit (110) for housing control electronics for the system.