Device for coating and/or surface treating substrates using a low pressure plasma comprises a cathode, an anode, and an auxiliary electrode with passages arranged between the substrate and the cathode forming an outer chamber

摘要

Device for coating and/or surface treating substrates using a low pressure plasma comprises a cathode, an anode, and an auxiliary electrode with passages arranged between the substrate and the cathode forming an outer chamber. A glow discharge is generated between the anode and cathode. An Independent claim is also included for a process for coating and/or surface treating substrates using a low pressure plasma in the above device.