发明名称 Semiconductor light-detecting element
摘要 A semiconductor light-detecting element includes a given substrate, an underlayer and a light-detecting element structure which are formed on said substrate in turn. The underlayer is made of a nitride semiconductor including Al element with a dislocation density of 1011/cm2 or below. The light-detecting element structure is made of a nitride semiconductor layer group including Al element at a larger content than the nitride semiconductor making the underlayer with a dislocation density of 1010/cm2 or below.
申请公布号 US2002175389(A1) 申请公布日期 2002.11.28
申请号 US20020147046 申请日期 2002.05.17
申请人 NGK INSULATORS, LTD 发明人 SHIBATA TOMOHIKO;ASAI KEIICHIRO;SUMIYA SHIGEAKI;TANAKA MITSUHIRO
分类号 H01L31/10;H01L21/20;H01L31/0304;H01L31/105;H01L31/18;(IPC1-7):H01L31/075;H01L31/117 主分类号 H01L31/10
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