发明名称 Process for the manufacture of piezoceramic multilayer actuators
摘要 For the manufacture of multilayer actuators, the laminate is split into several actuators, which are pyrolized and then sintered. Because lamination in the unsintered body often produces non-homogeneity in the density, and the shrinkage during the firing of the ceramic is not of a constant value, the final geometry of the actuators can only be accurately obtained by the hardening of the sintered actuators. But in this case the internal electrode layers deposited in the actuators are thereby also processed, which can cause electrical flashovers and leakage currents during operation. Thus, according to the invention, a procedure is provided in which the block of the stacked green films provided with internal electrodes is laminated, that at least one actuator is separated from the block, that the actuator obtains its shape by means of a machining operation, that it is then sintered, that the sinter skin produced by the sintering is used as an insulating layer and that the sinter skin is abraded at the points where the internal electrodes are connected to the external electrodes.
申请公布号 US2002175591(A1) 申请公布日期 2002.11.28
申请号 US20020079946 申请日期 2002.02.20
申请人 SCHREINER HANS-JURGEN;BINDIG REINER;SIMMERL MATTHIAS;SCHMIDT JURGEN 发明人 SCHREINER HANS-JURGEN;BINDIG REINER;SIMMERL MATTHIAS;SCHMIDT JURGEN
分类号 H01L41/22;H01L41/083;H01L41/24;H01L41/39;H02N2/02;(IPC1-7):H04R17/00;H01L41/04 主分类号 H01L41/22
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